Chemical Symbol: SiH4
Synonyms: Silicone tetrahydride, monosilane, silicane
Description
Silane is a colorless flammable gas with a shocking odor. The gas is
explosive when mixed with air.
Uses
Silane is used in the electronics industry for the production of polycrystalline
silicon, epitaxial deposition of single-crystal films, chemical vapor
deposition of silicone dioxide films and silicone nitrate films, as
well as deposition of amorphous silicon films in the production of
solar cells and copier drums.
